where bn,ox is the density-gradient coefficient in the oxide (SI unit: V·m
2), and
dn is the penetration depth into the oxide (m), given by
where m*n,ox and
mn,ox are the effective masses in the oxide (SI unit: kg) and
Φn,ox is the potential barrier height (SI unit: V). For silicon–silicon dioxide interfaces, Jin et. al. suggested the values of 0.22
m0, 0.5
m0, and 3.15 V, where
m0 is the electron mass.