Domain Equations for the Inductively Coupled Plasma Interface
The Inductively Coupled Plasma Interface
solves a system of coupled partial differential equations for:
•
The electron density
•
The mean electron energy
•
The mass fraction of each of the heavy species
•
The electrostatic potential
•
The electric field due to induction currents
For a nonpolarized plasma, the induction currents are computed in the frequency domain using the following equation:
(6-23)
•
Plasma Reactors Theory
•
The Magnetic Fields Interface
in the
AC/DC User’s Guide
