The Inductively Coupled Plasma Interface
The Inductively Coupled Plasma interface is used to study discharges that are sustained by induction currents. The induction currents are solved for in the frequency domain. The electron heating due to the induction currents is automatically handled by the software. This physics interface is available for 2D and 2D axisymmetric components.
When a predefined Inductively Coupled Plasma interface () is added from the Plasma branch () of the Model Wizard or Add Physics windows, Plasma and Magnetic Fields interfaces are added to the Model Builder. In addition, the Multiphysics Couplings node is added, which automatically includes the multiphysics coupling features Plasma Conductivity Coupling and Electron Heat Source.
When the Plasma physics interface is added, these default nodes are also added to the Model BuilderPlasma Model, Zero Charge, Insulation, and Initial Values. Then, from the Physics toolbar, add other nodes that implement, for example, the plasma chemistry and boundary conditions.
When the Magnetic Fields interface is added, these default nodes are also added to the Model BuilderAmpère’s Law, Magnetic Insulation, and Initial Values. Then, from the Physics toolbar, add other nodes that implement, for example, a coil.
Settings
The settings for the Plasma interface can be found in The Plasma Interface section. The settings for the Magnetic Fields interface can be found in The Magnetic Fields Interface in the AC/DC Module User’s Guide.
For a description of the multiphysics coupling nodes, refer to: