The Inductively Coupled Plasma interface is used to study discharges that are sustained by induction currents. The induction currents are solved for in the frequency domain. The electron heating due to the induction currents is automatically handled by the software. This physics interface is available for 2D and 2D axisymmetric components.
When a predefined Inductively Coupled Plasma interface (

) is added from the
Plasma branch (

) of the
Model Wizard or
Add Physics windows,
Plasma and
Magnetic Fields interfaces are added to the Model Builder. In addition, the
Multiphysics Couplings node is added, which automatically includes the multiphysics coupling features
Plasma Conductivity Coupling and
Electron Heat Source.
When the Plasma physics interface is added, these default nodes are also added to the
Model Builder —
Plasma Model,
Zero Charge, Insulation, and
Initial Values. Then, from the
Physics toolbar, add other nodes that implement, for example, the plasma chemistry and boundary conditions.
When the Magnetic Fields interface is added, these default nodes are also added to the
Model Builder —
Ampère’s Law, Magnetic Insulation, and
Initial Values. Then, from the
Physics toolbar, add other nodes that implement, for example, a coil.
The settings for the Plasma interface can be found in
The Plasma Interface section. The settings for the
Magnetic Fields interface can be found in
The Magnetic Fields Interface in the
AC/DC Module User’s Guide.