The basic structure of the library comes from the book Microsensors, MEMS, and Smart Devices (
Ref. 1). The material properties come from two primary sources: the
CRC Handbook of Chemistry and Physics (
Ref. 2) and
MacMillan’s Chemical and Physical Data (
Ref. 3). Some of the mechanical properties in the library are more MEMS-specific values from
The MEMS Handbook (
Ref. 4), and most of the semiconductor properties are values from
Ref. 5. Most of the PDMS material properties are based on
Ref. 7, where Young’s modulus is based on
Ref. 8.
Ref. 6 provides a valuable resource for cross-checking the insulation material properties.