where σ is the conductivity,
Je is an externally generated current density, and
Qj is the volume current source, which is usually zero in MEMS applications. Current flow through the device is specified by means of the
Normal Current Density and
Electric Insulation physics nodes. The
Electric Potential,
Ground, and
Terminal physics nodes are frequently employed to specify constant potential surfaces, which can also act as current sources or sinks.
Use Terminal boundary conditions to calculate resistances or conductances of the system. For more details see the
Lumped Parameters section.
