Period and Spatial Resolution

At the biased electrode the electrons can have strong period modulations and can attain high energies as in a pure CCP reactor. For these reasons the period and space resolution near the biased electrode need to be high as in a pure CCP reactor model. Even when the bias has low voltage amplitudes the current collected deviates strongly from a sinusoidal with the electron current having a strong contribution when the plasma sheath collapses. It is good practice to plot the current along the period of the biased electrode to see if more resolution is needed along the period. It is also good practice to plot the electron temperature to see if there is enough spatial resolution in the vicinity of the biased electrode.