The Importance of 1D Modeling

As explained above, 2D numerical models of a CCP can be very complex, demanding in terms of computer memory, and time consuming. For these reasons it is strongly suggested to start with a 1D version of the 2D model. 1D models are much faster and numerical stable and as such are ideal to gain insight on the discharge regime of operation, study the plasma chemistry, and investigate parameter spaces quickly.

A 1D model version of an asymmetric CCP reactor is also possible by using a 1D axial symmetric geometry. This way, it is possible to implement the asymmetry between the areas of the ground and powered electrode and allow for the development of a DC self–bias.

In a preparatory phase for a 2D model it is also useful to use a 1D model to check if the mesh resolution is sufficient to correctly describe the discharge physics.