The Inductively Coupled Plasma with RF Bias, Nonisothermal Flow Interface
The Inductively Coupled Plasma with RF Bias, Nonisothermal Flow () interface combines the Inductively Coupled Plasma with RF Bias multiphysics interface and the Plasma, Time Periodic, Nonisothermal Flow multiphysics interface.
This multiphysics interface adds Plasma, Time Periodic, Laminar Flow, Heat Transfer in Fluids, and Magnetic Fields interfaces. The Nonisothermal Plasma Flow, Plasma Conductivity Coupling, and Electron Heat Source multiphysics features are also added.
The magnetic field is solved in the frequency domain and the plasma, the fluid flow, and the heat transfer are solved in the time domain.
Settings
For a description of the multiphysics coupling nodes, refer to:
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Nonisothermal Plasma Flow
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Plasma Conductivity Coupling
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Electron Heat Source
For all the aforementioned five multiphysics interfaces under the Nonisothermal Plasma Flow () branch, some settings are predefined, meaning they are different from their default values if adding the single physics interface independently. These predefined settings are:
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The Calculate thermodynamic properties and the Convection checkboxes are selected in the Transport Settings section in the main node of the Plasma interface.
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The Fluid type is set as Gas/Liquid in the Thermodynamics, Fluid section of the Fluid node, in the Heat Transfer interface.
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The Compressibility is set as Compressible flow (Ma<0.3) in the Physical Model section in the main node of the Fluid Flow interface.