The Inductively Coupled Plasma with RF Bias interface is used to study discharges that are sustained by induction currents and have an additional time periodic electric excitation. The magnetic field is solved in the frequency domain and the plasma solves for a periodic steady-state. Multiphysics couplings couple the time averaged plasma conductivity to the Magnetic Fields interface and couple the resulting electron heating due to the induction currents back to the Plasma, Time Periodic interface. This physics interface is available for 2D and 2D axisymmetric components.

When a predefined Inductively Coupled Plasma with RF Bias interface () is added from the Plasma branch () of the Model Wizard or Add Physics windows, Plasma, Time Periodic and Magnetic Fields interfaces are added to the Model Builder. In addition, the Multiphysics Couplings node is added, which automatically includes the multiphysics coupling features Plasma Conductivity Coupling and Electron Heat Source.

When the Plasma, Time Periodic interface is added, these default nodes are also added to the Model Builder — Plasma Model, Zero Charge, Insulation, and Initial Values. Then, from the Physics toolbar, add other nodes that implement, for example, the plasma chemistry and boundary conditions.

When the Magnetic Fields interface is added, these default nodes are also added to the Model Builder — Ampère’s Law, Magnetic Insulation, and Initial Values. Then, from the Physics toolbar, add other nodes that implement, for example, a coil.

The settings for the Plasma, Time Periodic interface can be found in The Plasma, Time Periodic Interface section. The settings for the Magnetic Fields interface can be found in The Magnetic Fields Interface in the AC/DC Module User’s Guide.