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For the Terminal type, choose either Voltage, Power, or Circuit. When Circuit is selected, refer to the Circuit Options section. In nearly all cases, the Power option is a more stable way of driving the plasma, as multiple physically significant solutions can exist when a voltage source is used. When driving with a fixed power, there can only be one solution to the problem.
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RF. In this case, the excitation is periodic and the maximum and minimum amplitude of the applied voltage are equal. The following options are available.
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Select whether the Periodic function should be Cosine or Sine. This simply determines whether the excitation waveform should form a cosine or sine wave over the period.
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If the Terminal type is Voltage, enter the Voltage amplitude Va (SI unit: V) at the electrode. If the Terminal type is Power, enter the RF Power Prf (SI unit: W) to be deposited into the plasma.
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Enter the Frequency fp (SI unit: Hz) for the applied voltage or power. This value must be consistent with the value given for the Period property of the physics interface. See Using Consistent Source Frequencies and Period Settings for further information.
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Enter the Source phase α (SI unit: dimensionless) of the generator. The default is zero and this rarely needs to be changed.
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