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For the Terminal type, choose either Voltage, Power, or Circuit. When Circuit is selected, refer to the Circuit Options section. In nearly all cases, the Power option is a more stable way of driving the plasma, as multiple physically significant solutions can exist when a voltage source is used. When driving with a fixed power, there can only be one solution to the problem.
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RF. In this case, the excitation is periodic and the maximum and minimum amplitude of the applied voltage are equal. The following options are available.
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Select whether the Periodic function should be Cosine, Sine, Pulsed or Dual Pulsed. The first two options simply determine whether the excitation waveform should be a cosine or sine over the period. The last two apply a sinusoidal excitation at a given frequency for a specified number of periods. The usage of the pulsed options is discussed in Pulsed Discharges.
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If the Terminal type is Voltage, enter the Voltage amplitude Va (SI unit: V) at the electrode. If the Terminal type is Power, enter the RF Power Prf (SI unit: W) to be deposited into the plasma.
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Enter the Frequency fp (SI unit: Hz) for the applied voltage or power. This value must be consistent with the value given for the Period property of the physics interface. See Using Consistent Source Frequencies and Period Settings for further information.
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Enter the Source phase α (SI unit: dimensionless) of the generator. The default is zero and this rarely needs to be changed.
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RF and DC. This option allows an additional bias power or voltage to be applied, or the DC self–bias to be computed. In addition to the options for the RF case above, the following options are available:
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Compute DC self–bias. In asymmetric discharges, where the grounded surface area of the discharge is different from the powered electrode surface area, the powered electrode will form a negative DC self–bias. This requires that the period averaged current arriving on the electrode surface is zero. By checking this option, the software will automatically compute the DC self–bias on the electrode. When this option is selected, no other options in the DC Source section are available.
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When the Terminal type is Voltage, and Compute DC self–bias is off, enter a DC bias voltage Vdc,b (SI unit: V). This can be used to increase the ion or electron fluxes to the electrode which may result in a net current flow into the electrode. When the Terminal type is Power, and Compute DC self–bias is off, enter a DC bias power Pdc,b (SI unit: W). There is an additional option to specify whether the Bias should be Negative or Positive.
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DC. This option can be used to add a pure DC bias somewhere in the system, but there has to be at least one feature adding an RF excitation elsewhere. Adding a pure DC source generally makes it more difficult to obtain a converged solution. The following options are available:
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When the Terminal type is Voltage, enter a DC voltage Vdc (SI unit: V). When the Terminal type is Power, enter a DC power Pdc (SI unit: W). There is an additional option to specify whether the Electrode type should be Cathode or Anode, depending on whether the power should be deposited using a negative or positive potential.
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