Plasma Interfaces
This chapter describes the Plasma Module interfaces found under the Plasma branch ().
In this chapter:
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The Plasma Interface
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The Plasma, Time Periodic Interface
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The Inductively Coupled Plasma Interface
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The Inductively Coupled Plasma with RF Bias Interface
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The Microwave Plasma Interface
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The Plasma, Nonisothermal Flow Interface
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The Inductively Coupled Plasma, Nonisothermal Flow Interface
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The Microwave Plasma, Nonisothermal Flow Interface
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The Plasma, Time Periodic, Nonisothermal Flow Interface
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The Inductively Coupled Plasma with RF Bias, Nonisothermal Flow Interface
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Multiphysics Couplings
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Plasma Reactors Theory
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Capacitively Coupled Plasmas
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Inductively Coupled Plasma Reactors with RF Bias
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DC Discharges
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Theory for Inductively Coupled Plasmas
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Theory for Microwave Plasmas
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Theory for Global Models
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Computing Versus Assuming the EEDF
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Using Stationary Studies in Plasma Models
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Electronegative Discharges