COMSOL 6.4 - Plasma Module Nomenclature

Plasma Module Nomenclature

The Plasma Module has numerous variables and expressions used throughout the documentation and in COMSOL Multiphysics. Table 1-1 lists the variable, its description and its SI unit.

Table 1-1: Nomenclature Used Throughout the plasma module documentation.
variable	description	SI unit
ρ	Gas density	kg/m3
p	Pressure	Pa
T	Temperature	K
Mk	Molecular weight, species k	kg/mol
Mn	Mean molar mass	kg/mol
wk	Mass fraction, species k	1
Wk	Log of the mass fraction of species k	-
xk	Mole fraction, species k	1
Vk	Multicomponent diffusion velocity, species k	m/s
jk	Diffusive flux vector, species k	kg/(m2·s)
Dkj	Binary diffusion coefficient	m2/s
Dk,m	Mixture averaged diffusion coefficient	m2/s
	Multicomponent thermal diffusion coefficient	kg/(m·s)
Dk,f	Diffusion coefficient for species k	m2/s
Zk	Charge, species k	1
μk,m	Mixture averaged mobility, species k	m2/(V·s)
V	Electric potential	V
E	Electric field	V/m
R	Universal gas constant	J/(mol·K)
ck	Molar concentration, species k	mol/m3
rj	Reaction rate, reaction j	mol/(m3s)
kj	Rate constant or rate coefficient, reaction j	m3/(mol·s)
Rk	Rate expression, species k	kg/(m3·s)
nk	Number density, species k	1/m3
νkj	Stoichiometric matrix	1
q	Unit charge	C
kB	Boltzmann constant	J/K
Rsurf,k	Surface rate expression for species k	mol/(m2·s)
γf	Forward sticking coefficient	1
γi	Secondary emission coefficient	1
εi	Mean energy of secondary electrons	V
ρk	Mass concentration, species k	kg/m3
u	Mass averaged fluid velocity vector	m/s
F	Faraday’s constant	s·A/mol
NA	Avogadro constant	1/mol
vT	Thermal drift velocity	m/s
u	Mass averaged velocity field, x/r-component	m/s
v	Mass averaged velocity field, y/z-component	m/s
w	Mass averaged velocity field, z-component	m/s
σ	Surface charge density	C/m2
Γe	Electron flux	1/(m2·s)
qj	Surface reaction rate, reaction j	mol/(m2·s)
Aj	Frequency factor, reaction j	m3/(mol·s)
βj	Temperature exponent, reaction j	1
Ej	Activation energy, reaction j	J/mol
f(ε)	Electron energy distribution function (EEDF)	V-3/2
ε	Electron energy	V
	Mean electron energy	V
μe	Electron mobility	m2/(V·s)
Nn	Neutral number density	1/m3
μeNn	Reduced electron mobility	1/(V·m·s)
θ	Out-of-plane direction	rad
Ip	Plasma current	A