COMSOL 6.4 - Species

For each of the heavy species the following information is required:

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The molecular weight of the species

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The potential characteristic length of the species; required to compute the correct diffusivity and mobility

•

The potential energy minimum of the species; required to compute the correct diffusivity and mobility

In cases where the neutral gas temperature is solved for, the following additional information is required:

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The species molar enthalpy, entropy, and specific heat, which can be entered directly as a function of temperature or by using NASA polynomials

•

In the case of electronically excited species or ions, the properties of the ground state species can be entered, and an additional contribution to the species enthalpy can also be entered

The Plasma Module provides predefined transport and thermodynamic data for the following species:

Table 2-2: table of gases with predefined transport and thermodynamic data.
gas	formula
Helium	He
Neon	Ne
Argon	Ar
Krypton	Kr
Xenon	Xe
Carbon	C
Carbon hydride	CH
Methylene	CH2
Methyl radical	CH3
Methane	CH4
Carbon monoxide	CO
Carbon dioxide	CO2
Atomic fluorine	F
Fluorine	F2
Sulfur hexafluoride	SF6
Silicon tetrafluoride	SiF4
Atomic hydrogen	H
Hydrogen	H2
Water	H2O
Hydrogen peroxide	H2O2
Nitroxyl	HNO
Hydroperoxyl	HO2
Hydroxyl	OH
Atomic nitrogen	N
Nitrogen	N2
Nitrous oxide	N2O
Amino radical	NH
Amino radical	NH2
Ammonia	NH3
Nitric oxide	NO
Nitrogen dioxide	NO2
Atomic oxygen	O
Oxygen	O3
Ozone	O3
Silane	SiH4
Silane radical	SiH2
Disilane	Si2H6

The following surface species properties are also predefined:

Table 2-3: table of surface species with predefined physical and thermodynamic data.
Name	formula
Silicon	Si
Silicon hydride	SiH
Silicon dioxide	SiO2