Results
There are three default plots generated, one for the electron number density, one for the electron temperature and one for the electrostatic potential. After the model has solved, the default plot is of the electron density. The peak electron density occurs at the center of the reactor, underneath the RF coil. The electron density in this case is high enough to cause some shielding of the azimuthal electric field.
1
The electron “temperature” is highest directly underneath the coil, which is where the bulk of the power deposition occurs.
2
Now add a global plot for the coil resistance. This is defined as the real part of the total voltage drop over the coil divided by the current.
3
4
5
6
7
Now add a plot for the total power dissipated in the system. This is one half of the real part of the total voltage drop over the coil multiplied by the applied current.
8
9
10
11
12
Now you add some additional two dimensional plots.
1
2
3
4
5
A quick way of creating additional plots is to use the Duplicate option. Now create a plot of the norm of the high frequency electric field.
6
7
8
9
10
Observe that the electric field is slightly shielded by the plasma. This is due to the skin effect in the plasma. As the electron number density increases, the plasma tends to shield itself from the electric field. Now create a plot of the number density of electronically excited argon atoms.
11
12
13
14
15
Finally, create a new dataset only active on the plasma domain in order to make it easier to visualize the power deposition into the plasma.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
The effect of the shielding of the electric field due to the skin depth of the plasma is also apparent when plotting the power deposition.