Definitions
Average 1
1
In the Definitions toolbar click Nonlocal Couplings
and choose Average
.
2
In the Settings window for Average locate the Source Selection section. From the Geometric entity level list, choose Edge.
3
From the Selection list, choose Work Plane 1. This will cause edges 6, 33, and 103 to be highlighted in the Graphics window. These three edges form the beam line.
Next, set up the physics interface to simulate free molecular flow of outgassed hydrogen from the wafer surface.
and choose Average 
.