Global Definitions
Set up parameters for the wafer angle and pump speeds.
Parameters
1
In the Home toolbar click Parameters
and then select Parameters 1
. Alternatively, click the Parameters 1
node in the Model Builder.
Note:
On Linux and Mac, the Home toolbar refers to the specific set of controls near the top of the Desktop.
2
In the Settings window locate the Parameters section, enter (or copy and paste) the following settings in the Parameters table:
Name
Expression
Description
theta
30[deg]
Wafer angle
pumpspeedcryo
12000[l/s]
Pump speed for cryopumps
pumpspeedturbo
1500[l/s]
Pump speed for turbopump
Physical quantities can be entered in a wide range of units, using square brackets as for the pump speeds above. Unit multiples, such as ml/s, are also supported. See the section “Using Units” in the
COMSOL Multiphysics Reference Manual
for a detailed list of supported units.
Add an average coupling to compute the average number density along the beam line.
and then select Parameters 1 
. Alternatively, click the Parameters 1 
node in the Model Builder.