Importing Mask Data
The semiconductor processes used to manufacture MEMS devices are usually specified layer by layer through the definition of a mask set. It is often convenient to use these mask sets when building models of the 3D devices in COMSOL Multiphysics.
Use the ECAD Import Module to import mask data into COMSOL Multiphysics. See the ECAD Import Module User’s Guide or go to www.comsol.com/ecad-import-module for more information about this and other COMSOL products.