Infinite Elements and Perfectly Matched Layers
Infinite elements and perfectly matched layers (PMLs) are frequently required when modeling MEMS devices.
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Infinite elements are used in stationary or transient computations enabling a (finite sized) region of the model to represent a region stretching out to infinity. This applies to problems where the solution varies without oscillation in the infinite domain, a typical MEMS application is to compute the capacitance of a structure in a surrounding air ambient.
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Perfectly matched layers enable outgoing waves in a frequency domain model to be perfectly adsorbed. A typical MEMS application is to use PMLs to compute the anchor losses for a vibrating structure.
Infinite Elements, Perfectly Matched Layers, and Absorbing Layers in the COMSOL Multiphysics Reference Manual