Creating and Analyzing MEMS Models
T
his chapter gives an overview of the physics interfaces and features available for modeling MEMS devices in COMSOL Multiphysics
®
.
In this chapter:
•
Physics and Scaling for MEMS Devices
•
General Tools for MEMS Modeling
•
Structural Mechanics
•
Electrostatics
•
Piezoresistivity
•
Thermal Effects in MEMS Devices
•
Microfluidics
•
Connecting to Electrical Circuits
•
SPICE Import and Export