The MEMS Module Physics Interface Guide
The MEMS Module extends the functionality of the physics interfaces of the base package for COMSOL Multiphysics. The details of the physics interfaces and study types for the MEMS Module are listed in the table. The functionality of the COMSOL Multiphysics base package is given in the COMSOL Multiphysics Reference Manual.
In the COMSOL Multiphysics Reference Manual:
•
Studies and Solvers
•
The Physics Interfaces
•
For a list of all the core physics interfaces included with a COMSOL Multiphysics license, see Physics Interface Guide.
Physics interface
Icon
Tag
Space Dimension
Available Study Type
 AC/DC
Electric Currents1
ec
all dimensions
stationary; stationary source sweep; frequency domain; time dependent; small signal analysis, frequency domain; eigenfrequency
Electric Currents in Shells
ecis
3D
stationary; frequency domain; time dependent; eigenfrequency
Electric Currents in Layered Shells
ecis
3D
stationary; frequency domain; time dependent; eigenfrequency
Electrical Circuit
cir
Not space dependent
stationary; frequency domain; time dependent; frequency domain; eigenfrequency
Electrostatics1
es
all dimensions
stationary; time dependent; stationary source sweep; eigenfrequency; frequency domain; small signal analysis, frequency domain
 
Elastic Waves
 
Elastic Waves, Time Explicit
elte
3D, 2D, 2D axisymmetric
time dependent
 
Piezoelectric Waves, Time Explicit
—
3D, 2D, 2D axisymmetric
time dependent
Transport in Solids
ts
all dimensions
stationary; time dependent
Fluid Flow
 
Single-Phase Flow
 
Laminar Flow1
spf
3D, 2D, 2D axisymmetric
stationary; time dependent
 
Fluid–Structure Interaction
 
Fluid–Solid Interaction2
—
3D, 2D, 2D axisymmetric
stationary; time dependent
 
Conjugate Heat Transfer, Fluid–Solid Interaction2
—
3D, 2D, 2D axisymmetric
stationary; time dependent;
 
Fluid–Solid Interaction, Viscoelastic Flow2,7
—
3D, 2D, 2D axisymmetric
time dependent; time dependent with phase initialization
 
Fluid–Solid Interaction, Two-Phase Flow, Phase Field2,6
—
3D, 2D, 2D axisymmetric
time dependent; time dependent with phase initialization
 
Solid–Thin-Film Damping2
—
3D, 2D, 2D axisymmetric
stationary; eigenfrequency; time dependent; time dependent, modal; time dependent, modal reduced-order model; frequency domain; frequency domain, modal; frequency domain, modal reduced-order model; time dependent; response spectrum; random vibration (PSD)
 
Shell–Thin-Film Damping2,4
—
3D, 2D axisymmetric
stationary; eigenfrequency; time dependent; time dependent, modal; time dependent, modal reduced-order model; frequency domain; frequency domain, modal; frequency domain, modal reduced-order model; time dependent; response spectrum; random vibration (PSD)
 
Thin-Film Flow
 
Thin–Film Flow
tff
3D, 2D, 2D axisymmetric
stationary; time dependent; frequency domain; eigenfrequency
 
Thin–Film Flow, Domain
tff
2D
stationary; time dependent; frequency domain; eigenfrequency
 
Electromagnetic Heating
 
Joule Heating1,2
—
all dimensions
stationary; time dependent; small-signal analysis; frequency domain
 
Pyroelectricity
—
3D, 2D, 2D axisymmetric
stationary; time dependent
Structural Mechanics
Solid Mechanics1
solid
3D, 2D, 2D axisymmetric, 1D, 1D axisymmetric
stationary; eigenfrequency; eigenfrequency, prestressed; mode analysis; time dependent; time dependent, modal; time dependent, modal reduced-order model; frequency domain; frequency domain, modal; frequency domain, prestressed; frequency domain, prestressed, modal; frequency domain, modal reduced-order model; frequency domain, AWE reduced-order model; response spectrum; random vibration (PSD); linear buckling
Phase Field Damage8
—
3D, 2D, 2D axisymmetric
 
stationary; time dependent
 
Thermal–Structure Interaction
 
Thermal Stress, Solid2
—
3D, 2D, 2D axisymmetric
stationary; time dependent
 
Joule Heating and Thermal Expansion2
—
3D, 2D, 2D axisymmetric
stationary; time dependent
 
Thermoelasticity2
—
3D, 2D, 2D axisymmetric
eigenfrequency; frequency domain; time dependent
 
Electromechanics
 
Electromechanics2
—
3D, 2D, 2D axisymmetric
stationary; eigenfrequency, prestressed; time dependent; frequency domain, prestressed
 
Electromechanics, Shell2,4,5
 
3D, 2D axisymmetric
stationary; eigenfrequency, prestressed; time dependent; frequency domain, prestressed
 
Electromechanics, Membrane2,4,5
 
3D, 2D axisymmetric
stationary; eigenfrequency, prestressed; time dependent; frequency domain, prestressed
 
Electromechanics, Boundary Elements2
—
3D, 2D
stationary; eigenfrequency, prestressed; time dependent; frequency domain, prestressed
 
Piezoelectricity
 
Piezoelectricity, Solid2
—
3D, 2D, 2D axisymmetric
stationary; eigenfrequency; eigenfrequency, prestressed; time dependent; time dependent, modal; frequency domain; frequency domain, modal; frequency domain, prestressed; frequency domain, prestressed, modal; small-signal analysis, frequency domain; linear buckling
 
Piezoelectricity, Layered Shell2,5
—
3D
stationary; eigenfrequency; time dependent; frequency domain
 
Piezoelectricity and Pyroelectricity2
—
3D, 2D, 2D axisymmetric
stationary; eigenfrequency; eigenfrequency, prestressed; time dependent; time dependent, modal; frequency domain; frequency domain, modal; frequency domain, prestressed; frequency domain, prestressed, modal; small-signal analysis, frequency domain; linear buckling
 
Magnetomechanics
 
Piezomagnetism2,3
—
3D, 2D, 2D axisymmetric
stationary; eigenfrequency; time dependent; frequency domain; small-signal analysis, frequency domain; eigenfrequency, prestressed; frequency domain, prestressed
 
Nonlinear Magnetostriction2,3
—
3D, 2D, 2D axisymmetric
stationary; eigenfrequency; time dependent; frequency domain; small-signal analysis, frequency domain; eigenfrequency, prestressed; frequency domain, prestressed
 
Magnetomechanics2,3
—
3D, 2D, 2D axisymmetric
stationary; eigenfrequency; time dependent; frequency domain; small-signal analysis, frequency domain; eigenfrequency, prestressed; frequency domain, prestressed
 
 
Magnetomechanics, No Currents2,3
—
3D, 2D, 2D axisymmetric
stationary; eigenfrequency; time dependent; frequency domain; small-signal analysis, frequency domain; eigenfrequency, prestressed; frequency domain, prestressed
 
Electrostriction
 
Ferroelectroelasticity2
—
3D, 2D, 2D axisymmetric
stationary; time dependent; frequency domain
 
Electrostriction2
—
3D, 2D, 2D axisymmetric
stationary; time dependent; frequency domain
 
Piezoresistivity
 
Piezoresistivity, Domain Currents2
—
3D
stationary; eigenfrequency; time dependent; time dependent, modal; frequency domain; frequency domain, modal; small-signal analysis, frequency domain; eigenfrequency, prestressed; frequency domain, prestressed
 
Piezoresistivity, Boundary Currents2
—
3D
stationary; eigenfrequency; time dependent; time dependent, modal; frequency domain; frequency domain, modal; small-signal analysis, frequency domain; eigenfrequency, prestressed; frequency domain, prestressed
 
Piezoresistivity, Shell2,4
—
3D
stationary; time dependent; time dependent, modal; frequency domain; frequency domain, modal; small-signal analysis, frequency domain; eigenfrequency, prestressed; frequency domain, prestressed
 
Piezoresistivity, Layered Shell2,5
—
3D
stationary; time dependent; time dependent, modal; frequency domain; frequency domain, modal; small-signal analysis, frequency domain; eigenfrequency, prestressed; frequency domain, prestressed
1 This physics interface is included with the core COMSOL package but has added functionality for this module.
2 This physics interface is a predefined multiphysics coupling that automatically adds all the physics interfaces and coupling features required.
3 Requires the addition of the AC/DC Module.
4 Requires the addition of the Structural Mechanics Module.
5 Requires the addition of the Composite Materials Module.
6 Requires the addition of the CFD Module, or the Polymer Flow Module or the Microfluidics Module.
7 Requires the addition of the Polymer Flow Module.
8 Requires the addition of the Nonlinear Structural Materials Module.