Plasma Module
New Functionality in Version 6.4
Enhanced Modeling of Etching and Deposition
A range of new functionalities has been introduced to enhance the modeling of etching and deposition processes in semiconductor applications. Surface species are now supported within the Stationary solver and the Plasma, Time Periodic interface, enabling faster parameterization. They can also be designated as site-constraint species to efficiently capture self-limiting reaction mechanisms. In addition, surface reactions can now be defined with energy-dependent reaction yields. View these functionalities in th following models:
New Plasma Chemistry Import Feature
The new Plasma Chemistry Import feature can automatically create a complete plasma chemistry from a text file for models using the Plasma interface and the Plasma, Time Periodic interface. The contents of the text file can specify the aspects of a plasma chemistry, including species properties such as thermodynamic parameters, electron impact reactions from cross sections and rate constants, heavy-species reactions, and surface reactions. This feature is especially useful for plasma chemistries involving a large number of species and reactions. The following tutorial models use this new feature:
New Surface Reaction Group Feature
The Surface Reaction Group feature allows for the input of large sets of surface reactions in a table. Reaction data can be entered manually, imported from a file, or added automatically using the Plasma Chemistry import feature. The following new models demonstrate the use of this feature:
NEW Inductive and capacitive stochastic heating features
Two new features, Inductive Stochastic Heating and Capacitive Stochastic Heating, introduce an additional contribution to the electron collision frequency for momentum transfer, accounting for stochastic heating effects. This stochastic collision frequency is based on analytical models and can be applied to user-defined regions of the plasma domain.
General
The Metal Contact feature can now be applied to both plasma-facing boundaries and nonplasma boundaries.
The Species feature now includes a User defined option for specifying species thermodynamic parameters in the Species Thermodynamic Parameters section.
The Heavy Species Flux feature now has an option to add convection to the prescribed flux.
The Inflow feature has a new option that allows you to specify the mass flow rate.