This tutorial model demonstrates how to tune the natural frequency of a MEMS microphone diaphragm using the Shape Optimization interface and study. In this example, Stationary and Eigenfrequency study steps are used in succession to tune the natural frequency to a precise value by deforming the 2D shape of the suspension springs in accordance with standard MEMS fabrication specifications.

This tutorial model demonstrates how to use the Uncertainty Quantification Module to analyze the performance variation of a piezoelectric energy harvester that converts vibrational energy to electric energy. See how variations in manufacturing processes translate to variation in the device’s output power as the quantity of interest (QoI). Different Uncertainty Quantification (UQ) studies provide design-of-experiments data from finite element method (FEM) simulations and a surrogate model to evaluate the QoI.

FEM simulations can be used to obtain the surface acoustic wave (SAW) velocity and other related parameters, such as the squared electromechanical coupling coefficient, or k2, and reflectivity, or kp, for different configurations. Such parameters are used as inputs for various analytical and semianalytical methods of SAW device design. This tutorial model shows how the unit cell and the Periodic Condition features are used in an Eigenfrequency study to investigate a 128° YX-cut lithium niobate (LiNbO3) crystal sized for a center frequency of about 400 MHz with various electrode configurations.

In general, surface acoustic wave (SAW) devices use different crystal cuts of piezoelectric materials that do not coincide with the reference crystal axes used in COMSOL® software. This tutorial shows how the 128° YX-cut lithium niobate (LiNbO3) material property matrices are derived from default material properties using Euler angle rotation when the cut-specific data is not available. Euler angle rotations are applied in three configurations to calculate eigenfrequencies and eigenmodes.