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References
1.
V. Kaajakari,
Practical MEMS
, Small Gear Publishing, Las Vegas, 2009.
2.
S.D. Senturia,
Microsystem Design
, Springer Science and Business Media, New York, 2001.
3.
A.F. Bower,
Applied Mechanics of Solids
, CRC Press, Boca Raton, FL, 2010 (
https://solidmechanics.org
).