References
1. V. Kaajakari, Practical MEMS, Small Gear Publishing, Las Vegas, 2009.
2. S.D. Senturia, Microsystem Design, Springer Science and Business Media, New York, 2001.
3. A.F. Bower, Applied Mechanics of Solids, CRC Press, Boca Raton, FL, 2010 (https://solidmechanics.org).