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References
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2. R.L. Kinder and M.J. Kushner, “Consequences of mode structure on plasma properties in electron cyclotron resonance sources,” J. Vac. Sci. Technol. A, vol. 17, p. 2421, 1999.
3. M.A. Lieberman and A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, Wiley, 2005.