In the COMSOL Multiphysics Reference Manual:
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MEMS, an extended solid materials library with metals, semiconductors, insulators, and polymers common in MEMS devices.
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Piezoelectric, with over 20 common piezoelectric materials. The materials include temperature-dependent fluid dynamic and thermal properties.
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Piezoresistivity, with four materials each with seven material properties.
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In the COMSOL Multiphysics Reference Manual:
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For an example of the MEMS materials database, see Microresistor Beam: Application Library path MEMS_Module/Actuators/microresistor_beam.
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