References

1. G.J.M. Hagelaar, K. Makasheva, L. Garrigues, and J.-P. Boeuf, “Modelling of a dipolar microwave plasma sustained by electron cyclotron resonance”, J. Phys. D: Appl. Phys., vol. 42, p. 194019 (12pp), 2009.

2. R.L. Kinder and M.J. Kushner, “Consequences of mode structure on plasma properties in electron cyclotron resonance sources”, J. Vac. Sci. Technol. A, vol. 17, Sep/Oct 1999.

3. Michael A. Lieberman and Allan J. Lichtenberg, “Principles of Plasma Discharges and Materials Processing”, Wiley (2005).